Imashini ya Lithographie Mask Guhuza Ifoto-Imashini
Kumenyekanisha ibicuruzwa
Inkomoko yumucyo itwara UV LED yatumijwe hamwe nisoko yumucyo shaping module, hamwe nubushyuhe buto hamwe nisoko nziza yumucyo.
Imiterere itara ihindagurika ifite ingaruka nziza zo gukwirakwiza ubushyuhe nisoko yumucyo hafi, kandi gusimbuza itara rya mercure no kuyitaho biroroshye kandi byoroshye. Bifite ibikoresho byo hejuru binini binini byombi microscope hamwe na santimetero 21 z'ubugari bwa LCD, birashobora guhuzwa binyuze
ijisho cyangwa CCD + kwerekana, hamwe no guhuza neza neza, inzira yo gutegera no gukora byoroshye.
Ibiranga
Hamwe nimikorere yo gutunganya ibice
Kuringaniza igitutu cyitumanaho byerekana gusubiramo binyuze muri sensor
Ikinyuranyo cyo guhuza no gutandukanya icyuho gishobora gushyirwaho muburyo bwa digitale
Ukoresheje mudasobwa yashyizwemo + gukoraho ecran ikora, yoroshye kandi yoroshye, nziza kandi itanga
Kurura ubwoko hejuru no hepfo, byoroshye kandi byoroshye
Shigikira vacuum itumanaho, guhura cyane, guhura nigitutu no guhura hafi
Hamwe nimikorere ya nano
Igice kimwe kigaragara hamwe nurufunguzo rumwe, urwego rwo hejuru rwo kwikora
Iyi mashini ifite kwizerwa no kwerekana ibyoroshye, cyane cyane ikwiriye kwigisha, ubushakashatsi bwa siyansi ninganda muri za kaminuza na kaminuza
Ibisobanuro birambuye
Ibisobanuro
1. Ahantu ho kumurikirwa: 110mm × 110mm ；
2. ★ Uburebure bwumurambararo: 365nm;
3. Icyemezo: ≤ 1m;
4. Guhuza neza: 0.8m;
5.Icyerekezo cyimiterere ya scanne yimbonerahamwe ya sisitemu yo guhuza byibuze igomba guhura: Y: 10mm;
6. Umuyoboro wibumoso nu buryo bwiburyo bwa sisitemu yo guhuza urashobora kugenda ukundi muburyo bwa X, y na Z, icyerekezo X: ± 5mm, Y icyerekezo: ± 5mm na Z icyerekezo: ± 5mm;
7. Ingano ya mask: santimetero 2,5, santimetero 3, santimetero 4, santimetero 5;
8. Ingano y'icyitegererezo: igice, 2 ", 3", 4 ";
9. ★ Bikwiranye n'ubunini bw'icyitegererezo: 0.5-6mm, kandi irashobora gushyigikira ibice 20mm by'icyitegererezo kuri byinshi (byashizweho);
10. Uburyo bwo kumurika: igihe (uburyo bwo kubara);
11. Kudahuza amatara: ＜ 2,5%;
12. Imirima ibiri CCD ihuza microscope: lens zoom (inshuro 1-5) + lensike ya microscope;
13. Kugenda kwa mask ugereranije nicyitegererezo bigomba guhura byibuze: X: 5mm; Y: 5mm; : 6º ；
14. ★ Kugaragaza ubwinshi bwingufu:> 30MW / cm2,
15. position Umwanya uhuza hamwe nu mwanya wo kwerekana ukora muri sitasiyo ebyiri, na sitasiyo ebyiri za servo moteri ihinduka mu buryo bwikora;
16. Kuringaniza igitutu cyitumanaho bituma habaho gusubiramo binyuze muri sensor;
17. gap Icyuho cyo guhuza no gutandukanya icyuho gishobora gushyirwaho muburyo bwa digitale;
18. ★ Ifite intera ya nano yerekana kandi yegeranye;
19. ★ Gukoraho imikorere ya ecran;
20. Igipimo rusange: Hafi 1400mm (uburebure) 900mm (ubugari) 1500mm (uburebure).
